Transparent glass slab thickness measurement by binary-spot focus signal

Autores
Aguilar, Andrés; Torga, Jorge Román
Año de publicación
2019
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
Focus error systems based on the astigmatic principle relying on four quadrant photo detectors as the signal generation element have widely been used in many different applications. Nevertheless, its working principle is not particularly suitable for measurements involving more than one spot. In this work we propose a new method that uses a CCD as the detection device as well as a method of processing acquired data. A side effect of this change is the loss of the FES parameter key to these techniques. To overcome this issue a new parameter named focus signal is proposed. The thickness measuring process of a transparent sample with two reflective layers using this technique is also presented.
Fil: Aguilar, Andrés. Universidad Tecnológica Nacional. Facultad Regional Delta. Investigación, Ciencia y Tecnología. CENES. Grupo de Nanofotónica; Argentina.
Fil: Torga, Jorge Román. Universidad Tecnológica Nacional. Facultad Regional Delta. Investigación, Ciencia y Tecnología. CENES. Grupo de Nanofotónica; Argentina.
Peer Reviewed
Materia
UTN
Facultad Regional Delta
Focus-Error-Signal
Astigmatic
Thickness
Beam profilometer
Multiple spots
Nivel de accesibilidad
acceso abierto
Condiciones de uso
2020-07-17T03:10:33Z
Repositorio
Repositorio Institucional Abierto (UTN)
Institución
Universidad Tecnológica Nacional
OAI Identificador
oai:ria.utn.edu.ar:20.500.12272/4473
Acceder
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network_acronym_str RIAUTN
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network_name_str Repositorio Institucional Abierto (UTN)
spelling Transparent glass slab thickness measurement by binary-spot focus signalAguilar, AndrésTorga, Jorge RománUTNFacultad Regional DeltaFocus-Error-SignalAstigmaticThicknessBeam profilometerMultiple spotsFocus error systems based on the astigmatic principle relying on four quadrant photo detectors as the signal generation element have widely been used in many different applications. Nevertheless, its working principle is not particularly suitable for measurements involving more than one spot. In this work we propose a new method that uses a CCD as the detection device as well as a method of processing acquired data. A side effect of this change is the loss of the FES parameter key to these techniques. To overcome this issue a new parameter named focus signal is proposed. The thickness measuring process of a transparent sample with two reflective layers using this technique is also presented.Fil: Aguilar, Andrés. Universidad Tecnológica Nacional. Facultad Regional Delta. Investigación, Ciencia y Tecnología. CENES. Grupo de Nanofotónica; Argentina.Fil: Torga, Jorge Román. Universidad Tecnológica Nacional. Facultad Regional Delta. Investigación, Ciencia y Tecnología. CENES. Grupo de Nanofotónica; Argentina.Peer Reviewed2020-07-17T03:10:33Z2020-07-17T03:10:33Z2019-12-12info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfTransparent glass slab thickness measurement by binary-spot focus signal - Madrid; Año: 2019 vol. 52 p. 1 – 1-Revista Optica Pura y Aplicada – Editorial Sociedad Española de Óptica – Aguilar A. TorgaJ.http://hdl.handle.net/20.500.12272/447310.7149enginfo:eu-repo/semantics/openAccess2020-07-17T03:10:33Zhttp://creativecommons.org/licenses/by-nc-sa/4.0/Atribución-NoComercial-CompartirIgual 4.0 InternacionalAguilar, AndrésAtribución–No Comercial–Compartir Igual (by-nc-sa)reponame:Repositorio Institucional Abierto (UTN)instname:Universidad Tecnológica Nacional2026-10-01T11:59:17Zoai:ria.utn.edu.ar:20.500.12272/4473instacron:UTNInstitucionalhttp://ria.utn.edu.ar/Universidad públicaNo correspondehttp://ria.utn.edu.ar/oaigestionria@rec.utn.edu.ar; fsuarez@rec.utn.edu.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:a2026-10-01 11:59:18.595Repositorio Institucional Abierto (UTN) - Universidad Tecnológica Nacionalfalse
dc.title.none.fl_str_mv Transparent glass slab thickness measurement by binary-spot focus signal
title Transparent glass slab thickness measurement by binary-spot focus signal
spellingShingle Transparent glass slab thickness measurement by binary-spot focus signal
Aguilar, Andrés
UTN
Facultad Regional Delta
Focus-Error-Signal
Astigmatic
Thickness
Beam profilometer
Multiple spots
title_short Transparent glass slab thickness measurement by binary-spot focus signal
title_full Transparent glass slab thickness measurement by binary-spot focus signal
title_fullStr Transparent glass slab thickness measurement by binary-spot focus signal
title_full_unstemmed Transparent glass slab thickness measurement by binary-spot focus signal
title_sort Transparent glass slab thickness measurement by binary-spot focus signal
dc.creator.none.fl_str_mv Aguilar, Andrés
Torga, Jorge Román
author Aguilar, Andrés
author_facet Aguilar, Andrés
Torga, Jorge Román
author_role author
author2 Torga, Jorge Román
author2_role author
dc.subject.none.fl_str_mv UTN
Facultad Regional Delta
Focus-Error-Signal
Astigmatic
Thickness
Beam profilometer
Multiple spots
topic UTN
Facultad Regional Delta
Focus-Error-Signal
Astigmatic
Thickness
Beam profilometer
Multiple spots
dc.description.none.fl_txt_mv Focus error systems based on the astigmatic principle relying on four quadrant photo detectors as the signal generation element have widely been used in many different applications. Nevertheless, its working principle is not particularly suitable for measurements involving more than one spot. In this work we propose a new method that uses a CCD as the detection device as well as a method of processing acquired data. A side effect of this change is the loss of the FES parameter key to these techniques. To overcome this issue a new parameter named focus signal is proposed. The thickness measuring process of a transparent sample with two reflective layers using this technique is also presented.
Fil: Aguilar, Andrés. Universidad Tecnológica Nacional. Facultad Regional Delta. Investigación, Ciencia y Tecnología. CENES. Grupo de Nanofotónica; Argentina.
Fil: Torga, Jorge Román. Universidad Tecnológica Nacional. Facultad Regional Delta. Investigación, Ciencia y Tecnología. CENES. Grupo de Nanofotónica; Argentina.
Peer Reviewed
description Focus error systems based on the astigmatic principle relying on four quadrant photo detectors as the signal generation element have widely been used in many different applications. Nevertheless, its working principle is not particularly suitable for measurements involving more than one spot. In this work we propose a new method that uses a CCD as the detection device as well as a method of processing acquired data. A side effect of this change is the loss of the FES parameter key to these techniques. To overcome this issue a new parameter named focus signal is proposed. The thickness measuring process of a transparent sample with two reflective layers using this technique is also presented.
publishDate 2019
dc.date.none.fl_str_mv 2019-12-12
2020-07-17T03:10:33Z
2020-07-17T03:10:33Z
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv Transparent glass slab thickness measurement by binary-spot focus signal - Madrid; Año: 2019 vol. 52 p. 1 – 1-Revista Optica Pura y Aplicada – Editorial Sociedad Española de Óptica – Aguilar A. TorgaJ.
http://hdl.handle.net/20.500.12272/4473
10.7149
identifier_str_mv Transparent glass slab thickness measurement by binary-spot focus signal - Madrid; Año: 2019 vol. 52 p. 1 – 1-Revista Optica Pura y Aplicada – Editorial Sociedad Española de Óptica – Aguilar A. TorgaJ.
10.7149
url http://hdl.handle.net/20.500.12272/4473
dc.language.none.fl_str_mv eng
language eng
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
2020-07-17T03:10:33Z
http://creativecommons.org/licenses/by-nc-sa/4.0/
Atribución-NoComercial-CompartirIgual 4.0 Internacional
Aguilar, Andrés
Atribución–No Comercial–Compartir Igual (by-nc-sa)
eu_rights_str_mv openAccess
rights_invalid_str_mv 2020-07-17T03:10:33Z
http://creativecommons.org/licenses/by-nc-sa/4.0/
Atribución-NoComercial-CompartirIgual 4.0 Internacional
Aguilar, Andrés
Atribución–No Comercial–Compartir Igual (by-nc-sa)
dc.format.none.fl_str_mv application/pdf
application/pdf
dc.source.none.fl_str_mv reponame:Repositorio Institucional Abierto (UTN)
instname:Universidad Tecnológica Nacional
reponame_str Repositorio Institucional Abierto (UTN)
collection Repositorio Institucional Abierto (UTN)
instname_str Universidad Tecnológica Nacional
repository.name.fl_str_mv Repositorio Institucional Abierto (UTN) - Universidad Tecnológica Nacional
repository.mail.fl_str_mv gestionria@rec.utn.edu.ar; fsuarez@rec.utn.edu.ar
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score 13.364332

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