Simultaneous measurement of deformation and thickness change in polymer films

Autores
Torga, Jorge Román; Morel, Eneas Nicolás
Año de publicación
2006
Idioma
inglés
Tipo de recurso
artículo
Estado
versión publicada
Descripción
We present experimental results in deformation measurement and thickness change in polymer films employing Fourier domain interferometry. The set-up is a Michelson configuration in which interference signal betweeen light reflected from a reference arm is superposed with two reflection from the first and second interface from the film sample. Distance measurements for determination of deformation and thickness values were obtained after an inverse Fourier transform of the spectrum signal. With this configuration, measurements with 1 micron axial resolution, and 2mm dynamic range were obtained
Fil: Torga, Jorge Román. Universidad Tecnológica Nacional. Facultad Regional Delta.; Argentina
Fil: Morel, Eneas Nicolás. Universidad Tecnológica Nacional. Facultad Regional Delta.; Argentina
Peer Reviewed
Fuente
https://www.spiedigitallibrary.org//conference-proceedings-of-spie/6293/62930R/Simultaneous-measurement-of-deformation-and-thickness-change-in-polymer-films/10.1117/12.680546.short?SSO=1
Materia
Focus-Error-Signal
astigmatic
thickness
beam profilometer
multiple spots
Nivel de accesibilidad
acceso abierto
Condiciones de uso
2020-02-10T22:43:47Z
Repositorio
Repositorio Institucional Abierto (UTN)
Institución
Universidad Tecnológica Nacional
OAI Identificador
oai:ria.utn.edu.ar:20.500.12272/4284
Acceder
id RIAUTN_ea14761af859e7a573489242fef72a4f
oai_identifier_str oai:ria.utn.edu.ar:20.500.12272/4284
network_acronym_str RIAUTN
repository_id_str a
network_name_str Repositorio Institucional Abierto (UTN)
spelling Simultaneous measurement of deformation and thickness change in polymer filmsTorga, Jorge RománMorel, Eneas NicolásFocus-Error-Signalastigmaticthicknessbeam profilometermultiple spotsWe present experimental results in deformation measurement and thickness change in polymer films employing Fourier domain interferometry. The set-up is a Michelson configuration in which interference signal betweeen light reflected from a reference arm is superposed with two reflection from the first and second interface from the film sample. Distance measurements for determination of deformation and thickness values were obtained after an inverse Fourier transform of the spectrum signal. With this configuration, measurements with 1 micron axial resolution, and 2mm dynamic range were obtainedFil: Torga, Jorge Román. Universidad Tecnológica Nacional. Facultad Regional Delta.; ArgentinaFil: Morel, Eneas Nicolás. Universidad Tecnológica Nacional. Facultad Regional Delta.; ArgentinaPeer Reviewed2020-02-10T22:43:47Z2020-02-10T22:43:47Z2006-08-14info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501info:ar-repo/semantics/articuloapplication/pdfapplication/pdfEneas N. Morel and Jorge R. Torga "Simultaneous measurement of deformation and thickness change in polymer films", Proc. SPIE 6293, Interferometry XIII: Applications, 62930R (14 August 2006); https://doi.org/10.1117/12.680546http://hdl.handle.net/20.500.12272/428410.1117/12.680546https://www.spiedigitallibrary.org//conference-proceedings-of-spie/6293/62930R/Simultaneous-measurement-of-deformation-and-thickness-change-in-polymer-films/10.1117/12.680546.short?SSO=1reponame:Repositorio Institucional Abierto (UTN)instname:Universidad Tecnológica Nacionalenghttps://www.spiedigitallibrary.org//conference-proceedings-of-spie/6293/62930R/Simultaneous-measurement-of-deformation-and-thickness-change-in-polymer-films/10.1117/12.680546.short?SSO=1info:eu-repo/semantics/openAccess2020-02-10T22:43:47Zhttp://creativecommons.org/licenses/by-nc-sa/4.0/Torga, JorgeAtribución - No Comercial - Compartir Igual (by-nc-sa)Atribución-NoComercial-CompartirIgual 4.0 Internacional2026-09-24T12:45:42Zoai:ria.utn.edu.ar:20.500.12272/4284instacron:UTNInstitucionalhttp://ria.utn.edu.ar/Universidad públicaNo correspondehttp://ria.utn.edu.ar/oaigestionria@rec.utn.edu.ar; fsuarez@rec.utn.edu.arArgentinaNo correspondeNo correspondeNo correspondeopendoar:a2026-09-24 12:45:43.051Repositorio Institucional Abierto (UTN) - Universidad Tecnológica Nacionalfalse
dc.title.none.fl_str_mv Simultaneous measurement of deformation and thickness change in polymer films
title Simultaneous measurement of deformation and thickness change in polymer films
spellingShingle Simultaneous measurement of deformation and thickness change in polymer films
Torga, Jorge Román
Focus-Error-Signal
astigmatic
thickness
beam profilometer
multiple spots
title_short Simultaneous measurement of deformation and thickness change in polymer films
title_full Simultaneous measurement of deformation and thickness change in polymer films
title_fullStr Simultaneous measurement of deformation and thickness change in polymer films
title_full_unstemmed Simultaneous measurement of deformation and thickness change in polymer films
title_sort Simultaneous measurement of deformation and thickness change in polymer films
dc.creator.none.fl_str_mv Torga, Jorge Román
Morel, Eneas Nicolás
author Torga, Jorge Román
author_facet Torga, Jorge Román
Morel, Eneas Nicolás
author_role author
author2 Morel, Eneas Nicolás
author2_role author
dc.subject.none.fl_str_mv Focus-Error-Signal
astigmatic
thickness
beam profilometer
multiple spots
topic Focus-Error-Signal
astigmatic
thickness
beam profilometer
multiple spots
dc.description.none.fl_txt_mv We present experimental results in deformation measurement and thickness change in polymer films employing Fourier domain interferometry. The set-up is a Michelson configuration in which interference signal betweeen light reflected from a reference arm is superposed with two reflection from the first and second interface from the film sample. Distance measurements for determination of deformation and thickness values were obtained after an inverse Fourier transform of the spectrum signal. With this configuration, measurements with 1 micron axial resolution, and 2mm dynamic range were obtained
Fil: Torga, Jorge Román. Universidad Tecnológica Nacional. Facultad Regional Delta.; Argentina
Fil: Morel, Eneas Nicolás. Universidad Tecnológica Nacional. Facultad Regional Delta.; Argentina
Peer Reviewed
description We present experimental results in deformation measurement and thickness change in polymer films employing Fourier domain interferometry. The set-up is a Michelson configuration in which interference signal betweeen light reflected from a reference arm is superposed with two reflection from the first and second interface from the film sample. Distance measurements for determination of deformation and thickness values were obtained after an inverse Fourier transform of the spectrum signal. With this configuration, measurements with 1 micron axial resolution, and 2mm dynamic range were obtained
publishDate 2006
dc.date.none.fl_str_mv 2006-08-14
2020-02-10T22:43:47Z
2020-02-10T22:43:47Z
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
http://purl.org/coar/resource_type/c_6501
info:ar-repo/semantics/articulo
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv Eneas N. Morel and Jorge R. Torga "Simultaneous measurement of deformation and thickness change in polymer films", Proc. SPIE 6293, Interferometry XIII: Applications, 62930R (14 August 2006); https://doi.org/10.1117/12.680546
http://hdl.handle.net/20.500.12272/4284
10.1117/12.680546
identifier_str_mv Eneas N. Morel and Jorge R. Torga "Simultaneous measurement of deformation and thickness change in polymer films", Proc. SPIE 6293, Interferometry XIII: Applications, 62930R (14 August 2006); https://doi.org/10.1117/12.680546
10.1117/12.680546
url http://hdl.handle.net/20.500.12272/4284
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv https://www.spiedigitallibrary.org//conference-proceedings-of-spie/6293/62930R/Simultaneous-measurement-of-deformation-and-thickness-change-in-polymer-films/10.1117/12.680546.short?SSO=1
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
2020-02-10T22:43:47Z
http://creativecommons.org/licenses/by-nc-sa/4.0/
Torga, Jorge
Atribución - No Comercial - Compartir Igual (by-nc-sa)
Atribución-NoComercial-CompartirIgual 4.0 Internacional
eu_rights_str_mv openAccess
rights_invalid_str_mv 2020-02-10T22:43:47Z
http://creativecommons.org/licenses/by-nc-sa/4.0/
Torga, Jorge
Atribución - No Comercial - Compartir Igual (by-nc-sa)
Atribución-NoComercial-CompartirIgual 4.0 Internacional
dc.format.none.fl_str_mv application/pdf
application/pdf
dc.source.none.fl_str_mv https://www.spiedigitallibrary.org//conference-proceedings-of-spie/6293/62930R/Simultaneous-measurement-of-deformation-and-thickness-change-in-polymer-films/10.1117/12.680546.short?SSO=1
reponame:Repositorio Institucional Abierto (UTN)
instname:Universidad Tecnológica Nacional
reponame_str Repositorio Institucional Abierto (UTN)
collection Repositorio Institucional Abierto (UTN)
instname_str Universidad Tecnológica Nacional
repository.name.fl_str_mv Repositorio Institucional Abierto (UTN) - Universidad Tecnológica Nacional
repository.mail.fl_str_mv gestionria@rec.utn.edu.ar; fsuarez@rec.utn.edu.ar
_version_ 1877230907364999168
score 13.265058

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